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Evidence of Crystallization from Amorphous VOx to VO2 (M1) Thin Film Investigated by in-situ LEEM and NEXAFS Techniques

IMPACT SIGNAL75/100
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Information from the abstract

This work demonstrates that a combined real-time in-situ low-energy electron microscopy (LEEM) and near-edge X-ray absorption fine structure (NEXAFS) is a powerful technique for investigating the nucleation and growth processes of thin films. The crystallization from amorphous vanadium oxides (VOx) to vanadium dioxide (VO2) structures upon annealing under ultra-high vacuum (UHV) was studied. The VOx thin films were grown by direct current magnetron sputtering with an angle of incidence of 85°. In-situ LEEM observations revealed that at 340 °C, the film surface progressively developed interconnected crystalline domains, forming a distinctive cellular-like network. In-situ NEXAFS further revealed that, before any morphological changes, the V-O local coordination gradually relaxed toward a more ordered state, followed by clear nucleation of VO2 at 340 °C, evidenced by a distinct separation of the π* and σ* bands. This crystallization is accompanied by progressive crystal field splitting of the V 3d states and increased separation between the π and σ* features of the O K-edge, consistent with the development of long-range octahedral symmetry in VO2. X-ray photoelectron spectroscopy (XPS) confirmed that this crystallization was mainly structural, with no significant change in vanadium oxidation state. Additionally, ex-situ Raman spectroscopy confirmed the monoclinic M1 phase of VO2 after the post-deposition annealing process. These findings not only provide important insight into the crystallization mechanism of VOx thin films but also suggest that precise control over the sequence of structural and electronic ordering during fabrication may open new opportunities for tailoring the properties of VO2-based devices.

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Why this record is monitored

This record has an Impact Signal of 75/100 based on recency, source, collaboration, and bibliographic signals. It prioritizes monitoring and is not a judgment of research quality.

Related topics: Transition Metal Oxide Nanomaterials · Catalysis and Oxidation Reactions · Chemical and Physical Properties of Materials

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Thai researcher and institutional participation

Ukit Rittihong · Napatsakorn Sarapat · Thipusa Wongpinij · Chanan Euaruksakul · Saksorn Limwichean · Mati Horprathum · Prayoon Songsiriritthigul · Suranaree University of Technology · Synchrotron Light Research Institute · National Electronics and Computer Technology Center

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Data limitations

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