Investigation of the annealing duration effect on the structural, morphological, wettability, and mechanical properties of nanocrystalline iron disilicide
Thai researchers deposited nanocrystalline iron disilicide films on silicon using facing-target sputtering and compared annealing at 300 degrees Celsius for two, four, and six hours. Longer annealing improved crystallite distribution and appeared to reduce some defects, but produced only modest changes in structure, wettability, and hardness.